服务项目

Spare Parts to Keep In Clean Room 

Critical Parts for 300mm Tools 

1/ Pump

2/ Flow Controller 

3/ Servo Driver

4/ Test Jig

5/ PCB Boards

Services for Pad Con    Arm and Testing

Overhaul of Pad Con Arm for  

   300mm/200mm Reflexion and LK Reflexion Amat CMP Tool. Include service of

          1.  Change bearing of Pad Con Arm

          2.  Test drive for Pad Con sweep, rotation , Home Sensor, 

               Pad Con downforce

          3.  Check vibration of  Sweep and Rotation motor

      Trace recorded of Pad Con Arm Service Report

Refurbish Program for CMP Spindle and Kollmorgen

 Servo Drive 

Refurbish for Spindle and motor. Test with Applied Instruments special own program to check.

With that, end user did not worry about the working condition after hazard installation 

Service Of Malema CLC flow Controller 

 Services include 

1/ Change Pitch tubing

2/ Flow valve

3/ Test flow rate 

Services and Repair Motor     Drivers

(NSK, Kollmorgen, Sanyo Denki     etc)

Mirra Mesa, Reflexion and LK

Reflexion Amat CMP Tool parts Driver.